منابع مشابه
Squeeze Film Air Damping in Tapping Mode Atomic Force Microscopy
In dynamic plowing lithography, the sample surface is indented using a vibrating tip in tapping mode atomic force microscopy. During writing, the gap between the cantilever and the sample surface is very small, usually on the order of micrometers. High vibration frequency and small distance induce squeeze film air damping from the air in the gap. This damping can cause variations in the cantile...
متن کاملSqueeze-film damping of flexible microcantilevers
An improved theoretical approach is proposed to predict the dynamic behavior of long, slender and flexible microcantilevers affected by squeeze-film damping at low ambient pressures. Our approach extends recent continuum gas damping models (Veijola 2004 J. Micromech. Microeng. 14 1109–18, Gallis and Torczynski 2004 J. Microelectromech. Syst. 13 653–9), which were originally derived for a rigid ...
متن کاملA Macro Model of Squeeze-Film Air Damping in the Free- Molecule Regime
An accurate macro model for free-molecule squeeze-film air damping on micro plate resonators is present. This model relates air damping directly with device dimensions and operation parameters and therefore provides an efficient tool for the design of high-performance micro resonators. The construction of the macro model is based on Molecular Dynamics (MD) simulations and analytical traveling-t...
متن کاملSqueeze-Film Air Damping of a Five-Axis Electrostatic Bearing for Rotary Micromotors
Air-film damping, which dominates over other losses, plays a significant role in the dynamic response of many micro-fabricated devices with a movable mass suspended by various bearing mechanisms. Modeling the damping characteristics accurately will be greatly helpful to the bearing design, control, and test in various micromotor devices. This paper presents the simulated and experimental squeez...
متن کاملNonlinear Analysis of Squeeze Film Damper with Entrained Air in Rotordynamic Systems
Squeeze film dampers are widely used in aircraft engines, land-based gas turbines, and other rotating machines to improve system damping. They often have entrained air within the oil film, which is usually not taken into account in rotordynamics analysis due to lack of good formulations of the effects involved. The effects on the damping force calculation can be significant. This work presents ...
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ژورنال
عنوان ژورنال: TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series C
سال: 1980
ISSN: 0387-5024,1884-8354
DOI: 10.1299/kikaic.46.789